BOM
Chamber + Magnetron
$974.17
~
Pumping System + Vacuum Gauge
$11,399.86
$3,665.99
Gas Flow Components
$4,957.0
$2,145.9
Power Supply + Mathcing Network
$1,025.88
~
Total
$18,356.91
$7,811.94
The cheaper subs were not made in the CMU version because most expensive components were already available to us from past systems that could be thrifted.
Chamber + Magnetron
Aluminum disk (1/2" thick, 9" diameter)
2
72.23
Top Plate and Bottom Plate
Pyrex cylinder with flame polished ends(8.86" (225mm) OD, .275" (7mm) thick, 8" long)
1
225
Chamber walls
Viton "L" gasket (BJLGV-8)
2
155.6
Sealing between cylinder and top/bottom plates
Aluminum threaded rods (1/4"-20 thread, 8" long, 5 pack)
1
12.5
Support substrate stage
316 Stainless steel wing nuts (1/4"-20 threaded, 5 pack)
2
12.72
Support substrate stage
Aluminum Sheet (6"x24" .032")
1
12.95
Used for magnetron atmosphere side ground box, dark space shield plate, and substrate shutter
Vented cup point screw (18-8 stainless steel, 10-32 threaded 1/2" long, 5 pack)
1
6.33
Supports dark space shield plate, vented to avoid trapped air
Wing nuts (316 stainless steel, 10-32 threaded)
1
5.5
Supports dark space shield plate
Washers (Aluminum, 1.25" ID, 2.25" OD, .16" thick, 5 pack)
1
10.17
Stacked to set dark space shielding distance
N52SH Nedymium disk magnet (1" diamter, 1/8" thick)
1
4.30
Center magnet
N42SH Nedymium disk magnets (1/4" diamter, 1/8" thick)
8
4.8
Outer magnets
Alumina washers (2.5" OD, 1.062" ID, 1/8" thick)
2
25
Fills space between side of target/magnet block, and side walls. Protects viton gasket from metal deposition and plama degredation
Viton sheet (1/8" thick, 6" x 6")
1
38.97
Seal between steel cathode plate and aluminum top plate
Plate (low carbon steel, 1/16" thick, 3"x3")
1
5.69
Cathode plate, pole piece, supports magnets
Teflon coated copper wire, (12 AWG, 25 feet)
1
19.94
Connects UHF port to cathode plate
Terminal Connectors
1
12.99
Connects 12awg wire to cathode plate
PEEK Socket head screws (1/4"-20, 3/8" long)
4
23.48
Secures Cathode plate into top plate, compresses gasket
Copper heat sync (60x60x20mm)
1
23.48
Cooling on top of cathode plate
Aluminum socket head screws (4-40 threaded, 1/4" long, 10 pack)
1
12.81
Holds down magnetron atmosphere side ground box
Cooling Fans (60x10mm, 2 pack)
1
12.99
Air flow through ground box for air cooling
Nylon screws (M4 threaded, 20 mm long, 100 pack)
17.19
Secures fans to ground box without shorting to cathode plate.
UHF to solder cup connector
1
6
Allows for coax cable connection
KF16 Centered viton O-rings (10 pack)
1
18.5
Sealing KF16 bulkhead ports
KF16 Blanks
4
1.4
Sealing unused KF16 Bulkhead ports
KF16 bulkhead clamps
4
112.6
Modular KF16 ports
Flared collar thumb screw (1/4"-28 threaded, 18-8 Stainless steel, 1-1/4" long)
1
7.35
Substrate Shutter
Viton O rings (1/4" ID, 12" OD, 1/8" thick, 25 pack)
1
17.44
Substrate shutter sealing
DN100CF Gasket
1
45.00
Seal between pump and bottom plate
Total
$974.17
Pumping System + Vacuum Gauge
HiCube 300 Eco Pumping Station
1
10733.87
Solo turbo pumps can regularly be found on ebay for ~$2000. They would need to have a backing pump added in series, which could cost up to $1000 more including any needed connections or controls. So this item could be subbed for ~$3000
MPT 200 Pressure Gauge
1
590.76
Total
$11,399.86
Gas Flow Components
Alicat MC Series MFC (100 SCCM Ar)
1
1544.4
OEM versions of the same MFC (no display so would require controls) have been quoted for ~500, or could be sourced via ebay. Additionally, only 1 MFC is needed for non reactive sputteirng processes. So assuming 1 OEMor 2nd hand MFC, this is subed for ~$500.
Alicat MC Series MFC (50 SCCM O2)
1
1544.4
1/4" VCR Male to 1/4" Male NPT adapters
2
31.52
1/4" VCR Male to 1/8" Male NPT adapters
2
31.6
1/4" VCR metal gaskets
4
23
Flexible Metal gas line 1/4" male VCR ends
2
161.15
Cheaper pumbing can be done with bent SS tube or polypro tubes and compression fittings for ~$100 total
3850 series dual stage regulators
2
1587.04
Total
$4,957.09
(UHP Ar and O2 cylinders not included in BOM)
Power Supply and Matching Network
Yaesu FT-891 Transceiver
1
629.95
TP30SWI Switching DC power supply
1
99.99
Total
$1025.88
Last updated