Hacker Fab Documentation
Overview
- ✨Current Fab Capabilities
  - Fab Capabilities November 2023
  - Fab Capabilities May 2023
🟡Guides
📜Processes
- Self-Aligned NMOS V1
Fab Toolkit
🧑‍🍳Standard Operating Procedures
🟢WORKING DOCS
🔲Templates (to do)
Archive
- Patterning SOP - Stepper V1

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Fab Toolkit

Etching

etch rate
selectivity
uniformity
anisotropy
effect on photoresist?

Last updated 11 months ago

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