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  • Hacker Fab Documentation
  • Overview
    • ✨Current Fab Capabilities
  • 🟡Guides
    • Build-a-Fab
    • Filling in the Gaps - Background Resources
    • Part Sourcing
  • 📜Processes
    • Self-Aligned NMOS V1
  • Fab Toolkit
    • 🎥Patterning
      • Lithography Stepper V2.1
      • Lithography Stepper V2 Build
      • Lithography Stepper V1 Build
      • Getting started with Klayout
      • Patterning Tasks - Spring 2025
    • 🧱Deposition
    • 🕳️Etching
    • 🛠️Annealing
    • Electronic Design Automation
    • 🔍Metrology / Characterization
    • 🏘️Submodules
    • 📚Database
  • 🧑‍🍳Standard Operating Procedures
    • Patterning SOP - Stepper V2
    • Plasma Etcher SOP
    • Spin on Glass/Diffusant SOP
    • Tube Furnace SOP
    • Glass Acid Etch SOP
    • Thermal Evaporator SOP (CMU Version)
    • MTI Evaporator SOP (No longer in use)
    • Aluminum Etch SOP
    • Probe Station SOP
    • Probe Station SOP - V2
    • Wafer Cleaving SOP
    • Dry Oxide Growth SOP
    • Profilometer SOP
    • KLayout Mask Generation SOP
  • 🟢WORKING DOCS
    • CMOS Source/Drain Metal Contact Optimization
    • CMOS Doping Process Development
    • Sputtering Gate Oxides + Metal Gate Contacts
    • NAND + Inverter Characterization
    • CMU Updates
  • 🔲Templates (to do)
    • Build Manual Template
    • Bought Equipment Template
    • Standard Operating Procedure Template
    • BOM Template
    • Hardware X Template (for reference)
  • Archive
    • Patterning SOP - Stepper V1
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On this page
  1. Fab Toolkit
  2. 🎥Patterning
  3. Blu-Ray Lithography
  4. Lithography Spinner V1

Documentation

Project Specification

Datasheets

Reference Datasheets
  1. ToF Laser diode driver https://www.infineon.com/dgdl/Infineon-IRS9102C-DataSheet-v01_00-EN.pdf?fileId=8ac78c8c919c9f9d01923335dc1b43c5

  2. Blu-Ray Laser Diode Driver https://www.renesas.com/en/document/sds/isl58797-data-short?r=506001 https://www.renesas.com/en/document/dst/isl58792-datasheet https://rocelec.widen.net/view/pdf/eyrlshzeil/ATMLS04748-1.pdf?t.download=true&u=5oefqw

  3. Blu-Ray Laser Diode https://media.digikey.com/pdf/Data%20Sheets/Sharp%20PDFs/GH04P21A2GE.pdf

  4. Photo Detector IC https://www.digchip.com/datasheets/download_datasheet.php?id=3143605&part-number=MLX75012

  5. CMOS to LVDS Driver https://www.analog.com/en/products/adn4661.html

Last updated 7 months ago