# Carnegie Mellon University

The [Hacker Fab @ CMU](https://hackerfab.ece.cmu.edu/) operates as an integrated course + lab. The course covers nanofabrication and device fundamentals. Students spend the majority of their time working on a project that adds a new tool/process to the fab or improves an exisiting one. Additionally, students participate in labs where they use the DIY tools to fab and characterize devices. Here is a link to the Hacker Fab @ CMU [student google drive](https://drive.google.com/drive/folders/1sxDHE6ObghR9wuX18UZ02fEs8JJAK2E_?usp=drive_link), which contains more info on the course/lab at CMU.

Contact(s):

* Jay Kunselman

Tooling in use:

* DIY Litho Stepper
* DIY RF Sputtering
* DIY Evaporator
* DIY Spin coater
* 2 fume hoods (lab infrastructure)
* Purchased Plasma Etcher
* Purchased Tube furnace

Verified device capabilites:

* NMOS, 5um gate length (based on P type wafers with SiO2 and PolySi prefabed by waferPro)
* MOSCaps
* Resistors
* Diodes
* Inverters
* NAND gates

Tooling in progress:

* ALD
* 2D crystal stacking robot
* STM
* Automated Sputtering
* Automated Litho Stepper
* EDA tools

Device capabilities in progress:

* CMOS (with in house sputtered gate stack)