search
contribute.

Carnegie Mellon University

The Hacker Fab @ CMUarrow-up-right operates as an integrated course + lab. The course covers nanofabrication and device fundamentals. Students spend the majority of their time working on a project that adds a new tool/process to the fab or improves an exisiting one. Additionally, students participate in labs where they use the DIY tools to fab and characterize devices. Here is a link to the Hacker Fab @ CMU student google drivearrow-up-right, which contains more info on the course/lab at CMU.

Contact(s):

  • Jay Kunselman

Tooling in use:

  • DIY Litho Stepper

  • DIY RF Sputtering

  • DIY Evaporator

  • DIY Spin coater

  • 2 fume hoods (lab infrastructure)

  • Purchased Plasma Etcher

  • Purchased Tube furnace

Verified device capabilites:

  • NMOS, 5um gate length (based on P type wafers with SiO2 and PolySi prefabed by waferPro)

  • MOSCaps

  • Resistors

  • Diodes

  • Inverters

  • NAND gates

Tooling in progress:

  • ALD

  • 2D crystal stacking robot

  • STM

  • Automated Sputtering

  • Automated Litho Stepper

  • EDA tools

Device capabilities in progress:

  • CMOS (with in house sputtered gate stack)

Last updated