> For the complete documentation index, see [llms.txt](https://docs.hackerfab.org/home/llms.txt). Markdown versions of documentation pages are available by appending `.md` to page URLs; this page is available as [Markdown](https://docs.hackerfab.org/home/individual-fab-information/carnegie-mellon-university.md).

# Carnegie Mellon University

The [Hacker Fab @ CMU](https://hackerfab.ece.cmu.edu/) is the birthplace of the Hacker Fab initiative, and operates as an integrated course + lab. The course covers nanofabrication and device fundamentals. Students spend the majority of their time working on a project that adds a new tool/process to the fab or improves an existing one. Additionally, students participate in labs where they use the DIY tools to fab and characterize devices.

Contact(s):

* Joel Gonzalez (<bgonzale@andrew.cmu.edu>)
* Icey Chen (<yanbing@andrew.cmu.edu>)
* Rahim Malik (<rahimm@andrew.cmu.edu>)
* Jay Kunselman (<jskunsel@andrew.cmu.edu>)
* Kent Wirant (<jwirant@andrew.cmu.edu>)

Tooling in use:

* DIY Litho Stepper
* DIY RF Sputtering
* DIY Evaporator
* DIY Spin coater
* 2 fume hoods (lab infrastructure)
* Purchased Plasma Etcher
* Purchased Tube Furnace

Verified device capabilities:

* NMOS, 5um gate length (based on P type wafers with SiO2 and PolySi pre-fabbed by WaferPro)
* MOSCaps
* Resistors
* Diodes
* Inverters
* NAND gates

Tooling in progress:

* ALD
* 2D crystal stacking robot
* Automated Sputtering
* Automated Litho Stepper
* EDA tools

Device capabilities in progress:

* PMOS, CMOS (with in-house sputtered gate stack)


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