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Carnegie Mellon University

The Hacker Fab @ CMU is the birthplace of the Hacker Fab initiative, and operates as an integrated course + lab. The course covers nanofabrication and device fundamentals. Students spend the majority of their time working on a project that adds a new tool/process to the fab or improves an existing one. Additionally, students participate in labs where they use the DIY tools to fab and characterize devices.

Contact(s):

  • Joel Gonzalez (bgonzale@andrew.cmu.edu)

  • Icey Chen (yanbing@andrew.cmu.edu)

  • Rahim Malik (rahimm@andrew.cmu.edu)

  • Jay Kunselman (jskunsel@andrew.cmu.edu)

  • Kent Wirant (jwirant@andrew.cmu.edu)

Tooling in use:

  • DIY Litho Stepper

  • DIY RF Sputtering

  • DIY Evaporator

  • DIY Spin coater

  • 2 fume hoods (lab infrastructure)

  • Purchased Plasma Etcher

  • Purchased Tube Furnace

Verified device capabilities:

  • NMOS, 5um gate length (based on P type wafers with SiO2 and PolySi pre-fabbed by WaferPro)

  • MOSCaps

  • Resistors

  • Diodes

  • Inverters

  • NAND gates

Tooling in progress:

  • ALD

  • 2D crystal stacking robot

  • Automated Sputtering

  • Automated Litho Stepper

  • EDA tools

Device capabilities in progress:

  • PMOS, CMOS (with in-house sputtered gate stack)

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