# Fab Toolkit - [🔬 Research Tools](https://docs.hackerfab.org/home/fab-toolkit/research-tools.md) - [2D Crystal Stacking Robot (WIP)](https://docs.hackerfab.org/home/fab-toolkit/research-tools/2d-crystal-stacking-robot-wip.md): Work still in progress, full system developed - [Microscope Camera Module](https://docs.hackerfab.org/home/fab-toolkit/research-tools/2d-crystal-stacking-robot-wip/microscope-camera-module.md): 2D Crystal Stacking Bot Submodule - [Central Control Software](https://docs.hackerfab.org/home/fab-toolkit/research-tools/2d-crystal-stacking-robot-wip/central-control-software.md): 2D Crystal Stacking Bot Submodule - [Microscope Focus Module](https://docs.hackerfab.org/home/fab-toolkit/research-tools/2d-crystal-stacking-robot-wip/microscope-focus-module.md): 2D Crystal Stacking Bot Submodule - [Carousel Module](https://docs.hackerfab.org/home/fab-toolkit/research-tools/2d-crystal-stacking-robot-wip/carousel-module.md): 2D Crystal Stacking Bot Submodule - [Chip Return Stage](https://docs.hackerfab.org/home/fab-toolkit/research-tools/2d-crystal-stacking-robot-wip/carousel-module/chip-return-stage.md): Carousel Submodule - [Frame](https://docs.hackerfab.org/home/fab-toolkit/research-tools/2d-crystal-stacking-robot-wip/frame.md): 2D Crystal Stacking Bot Submodule - [Mounts](https://docs.hackerfab.org/home/fab-toolkit/research-tools/2d-crystal-stacking-robot-wip/frame/mounts.md) - [NOTICE](https://docs.hackerfab.org/home/fab-toolkit/research-tools/2d-crystal-stacking-robot-wip/notice.md) - [LICENSE](https://docs.hackerfab.org/home/fab-toolkit/research-tools/2d-crystal-stacking-robot-wip/license.md) - [Patterning](https://docs.hackerfab.org/home/fab-toolkit/patterning.md) - [Lithography Stepper V2.1](https://docs.hackerfab.org/home/fab-toolkit/patterning/lithography-stepper-v2.1.md) - [Lithography Stepper V2 Build](https://docs.hackerfab.org/home/fab-toolkit/patterning/lithography-stepper-v2-build-work-in-progress.md) - [Lithography Stepper V1 Build](https://docs.hackerfab.org/home/fab-toolkit/patterning/photolithography-stepper-v1.md) - [Getting started with Klayout](https://docs.hackerfab.org/home/fab-toolkit/patterning/getting-started-with-klayout.md) - [Patterning Tasks - Spring 2025](https://docs.hackerfab.org/home/fab-toolkit/patterning/patterning-tasks-spring-2025.md) - [Blu-Ray Lithography](https://docs.hackerfab.org/home/fab-toolkit/patterning/blu-ray-lithography.md) - [Work in Progress](https://docs.hackerfab.org/home/fab-toolkit/patterning/blu-ray-lithography/work-in-progress.md) - [KEM-497AAA Pin Out Analysis](https://docs.hackerfab.org/home/fab-toolkit/patterning/blu-ray-lithography/work-in-progress/kem-497aaa-pin-out-analysis.md) - [Lithography Spinner V1](https://docs.hackerfab.org/home/fab-toolkit/patterning/blu-ray-lithography/lithography-spinner-v1.md) - [Documentation](https://docs.hackerfab.org/home/fab-toolkit/patterning/blu-ray-lithography/lithography-spinner-v1/documentation.md) - [Design Datasheets](https://docs.hackerfab.org/home/fab-toolkit/patterning/blu-ray-lithography/lithography-spinner-v1/documentation/design-datasheets.md) - [Hardware](https://docs.hackerfab.org/home/fab-toolkit/patterning/blu-ray-lithography/lithography-spinner-v1/hardware.md) - [BU40N Reference Design](https://docs.hackerfab.org/home/fab-toolkit/patterning/blu-ray-lithography/lithography-spinner-v1/hardware/bu40n-reference-design.md) - [Software](https://docs.hackerfab.org/home/fab-toolkit/patterning/blu-ray-lithography/lithography-spinner-v1/software.md) - [Base Principles](https://docs.hackerfab.org/home/fab-toolkit/patterning/blu-ray-lithography/base-principles.md) - [Multi-Layer Tiling](https://docs.hackerfab.org/home/fab-toolkit/patterning/multi-layer-tiling.md): This page describes approaches and experiments for single and multi-layered tiling for lithography - [Deposition](https://docs.hackerfab.org/home/fab-toolkit/deposition.md) - [DIY DC Sputtering (WIP) (UWaterloo)](https://docs.hackerfab.org/home/fab-toolkit/deposition/diy-dc-sputtering-wip-uwaterloo.md) - [Thermal Evaporator V1 Build (WIP)](https://docs.hackerfab.org/home/fab-toolkit/deposition/thermal-evaporator-v1-build-to-do.md) - [Spin Coater V2 Build (work in progress)](https://docs.hackerfab.org/home/fab-toolkit/deposition/spin-coater-v2-build-work-in-progress.md) - [Spin Coater V1 Build (to do)](https://docs.hackerfab.org/home/fab-toolkit/deposition/spin-coater-v1-build-to-do.md) - [Electroless Nickel Plating](https://docs.hackerfab.org/home/fab-toolkit/deposition/electroless-nickel-plating.md) - [DIY RF Sputtering Chamber](https://docs.hackerfab.org/home/fab-toolkit/deposition/diy-rf-sputtering-chamber.md) - [BOM](https://docs.hackerfab.org/home/fab-toolkit/deposition/diy-rf-sputtering-chamber/bom.md) - [Build Instructions](https://docs.hackerfab.org/home/fab-toolkit/deposition/diy-rf-sputtering-chamber/build-instructions.md) - [SOP](https://docs.hackerfab.org/home/fab-toolkit/deposition/diy-rf-sputtering-chamber/sop.md): Guide to using the RF sputtering chamber. This is not a concise guide. you should understand the sputtering machine's design, function, and operating procedure well before interacting with it. - [Film Characterization](https://docs.hackerfab.org/home/fab-toolkit/deposition/diy-rf-sputtering-chamber/film-characterization.md) - [Add ons and WIP](https://docs.hackerfab.org/home/fab-toolkit/deposition/diy-rf-sputtering-chamber/add-ons-and-wip.md): The pages below this category include info on subsystems + improvements that have been added to chamber, or are planning to be added. - [QCM for RF Sputtering](https://docs.hackerfab.org/home/fab-toolkit/deposition/diy-rf-sputtering-chamber/add-ons-and-wip/qcm-for-rf-sputtering.md): Details are for Version 1 of the sensor head design. Discussion of design choices and build instructions can be found in the documentation document. - [Sputtering Automation Control System](https://docs.hackerfab.org/home/fab-toolkit/deposition/diy-rf-sputtering-chamber/add-ons-and-wip/sputtering-automation-control-system.md) - [Automated Impedance Matching](https://docs.hackerfab.org/home/fab-toolkit/deposition/diy-rf-sputtering-chamber/add-ons-and-wip/automated-impedance-matching.md): Miguel Salvacion and William Gao, Carnegie Mellon University - [⚛️DIY Atomic Layer Deposition](https://docs.hackerfab.org/home/fab-toolkit/deposition/diy-ald.md): HackerFab DIY Low-Cost Atomic Layer Deposition (ALD) Tool - [Summer 2025 CMU Update](https://docs.hackerfab.org/home/fab-toolkit/deposition/diy-ald/summer-2025-cmu-update.md): This page contains information about the state of the ALD project as of August 2025. This is the most recent update for the project, and focuses on control systems + precursor handling. - [Spring 2025 CMU Update](https://docs.hackerfab.org/home/fab-toolkit/deposition/diy-ald/spring-2025-cmu-update.md): This page contains information about the state of the ALD project as of May 2025. - [Fall 2024 CMU Update](https://docs.hackerfab.org/home/fab-toolkit/deposition/diy-ald/fall-2024-cmu-update.md): This page contains information about the state of the ALD project at CMU as of December 2024. Please note that many of the system components are outdated as of the May 2025 progress update. - [Spring 2026 CMU Update](https://docs.hackerfab.org/home/fab-toolkit/deposition/diy-ald/spring-2026-cmu-update.md): This page contains information about the state of the ALD project at CMU as of May 2026. - [Etching](https://docs.hackerfab.org/home/fab-toolkit/etching.md) - [Plasma Etcher](https://docs.hackerfab.org/home/fab-toolkit/etching/plasma-etcher.md) - [HF Jig](https://docs.hackerfab.org/home/fab-toolkit/etching/hf-jig.md) - [Annealing](https://docs.hackerfab.org/home/fab-toolkit/annealing.md) - [Tube Furnace](https://docs.hackerfab.org/home/fab-toolkit/annealing/tube-furnace.md): All articles in this section are written by Nathaniel Jordan - [Tube Furnace 6: Silver](https://docs.hackerfab.org/home/fab-toolkit/annealing/tube-furnace/tube-furnace-6-silver.md) - [Tube Furnace 5: Flame](https://docs.hackerfab.org/home/fab-toolkit/annealing/tube-furnace/tube-furnace-5-flame.md) - [Tube Furnace 4: Aphex](https://docs.hackerfab.org/home/fab-toolkit/annealing/tube-furnace/tube-furnace-4-aphex.md) - [Tube Furnace 3: Tabasco](https://docs.hackerfab.org/home/fab-toolkit/annealing/tube-furnace/tube-furnace-3-tabasco.md) - [Oxidation Chart & Results](https://docs.hackerfab.org/home/fab-toolkit/annealing/tube-furnace/oxidation-chart-and-results.md) - [Malfunction Log](https://docs.hackerfab.org/home/fab-toolkit/annealing/tube-furnace/malfunction-log.md) - [Electronic Design Automation](https://docs.hackerfab.org/home/fab-toolkit/electronic-design-automation.md) - [KLayout LVS Setup with Sky130 PDK](https://docs.hackerfab.org/home/fab-toolkit/electronic-design-automation/klayout-lvs-setup-with-sky130-pdk.md) - [Mask Generation and DRC](https://docs.hackerfab.org/home/fab-toolkit/electronic-design-automation/mask-generation-and-drc.md): Source doc can be found at: https://docs.google.com/document/d/1ZS5bjdoCn44r\_l2MRa-WB74HD4ZpJ85C6W1FY36Ok1k/edit?tab=t.0 - [Device Modeling](https://docs.hackerfab.org/home/fab-toolkit/electronic-design-automation/device-modeling.md): Source doc can be found at: https://docs.google.com/document/d/1FCWTG4O32Z9\_obltcXkp06KeX1oHtoSjYk6xLp93loU/edit?tab=t.0#heading=h.qtlewtj99lm8 - [KLayout Mask Generation SOP](https://docs.hackerfab.org/home/fab-toolkit/electronic-design-automation/klayout-mask-generation-sop.md) - [MagicVLSI DRC and LVS - WIP](https://docs.hackerfab.org/home/fab-toolkit/electronic-design-automation/magicvlsi-drc-and-lvs-wip.md): MagicVLSI is an open-source EDA tool capable of real-time DRC detection, generating SPICE (Simulation Program with Integrated Circuit Emphasis) netlist, and more. - [KLayout NMOS Array Generation](https://docs.hackerfab.org/home/fab-toolkit/electronic-design-automation/klayout-nmos-array-generation.md) - [Metrology / Characterization](https://docs.hackerfab.org/home/fab-toolkit/metrology-characterization.md) - [Probe Station](https://docs.hackerfab.org/home/fab-toolkit/metrology-characterization/probe-station.md): A step-by-step guide on working with the Probe Station - [Semiconductor Parameter Analyzer](https://docs.hackerfab.org/home/fab-toolkit/metrology-characterization/semiconductor-parameter-analyzer.md) - [SMU - Analog Discovery](https://docs.hackerfab.org/home/fab-toolkit/metrology-characterization/semiconductor-parameter-analyzer/smu-analog-discoveries.md): A guide on Analog Discoveries and Waveforms Software - [SMU - Keithley 4200SCS](https://docs.hackerfab.org/home/fab-toolkit/metrology-characterization/semiconductor-parameter-analyzer/smu-keithley-4200scs.md) - [CV Measurements](https://docs.hackerfab.org/home/fab-toolkit/metrology-characterization/cv-measurements.md) - [CV Measurement Setup (UWaterloo)](https://docs.hackerfab.org/home/fab-toolkit/metrology-characterization/cv-measurement-setup-uwaterloo.md): contact: @shreeja on discord - [Spectrometer](https://docs.hackerfab.org/home/fab-toolkit/metrology-characterization/spectrometer.md) - [Profilometer](https://docs.hackerfab.org/home/fab-toolkit/metrology-characterization/profilometer.md) - [IC Packaging](https://docs.hackerfab.org/home/fab-toolkit/metrology-characterization/ic-packaging.md): Hacker Fab DIY IC packaging documentation - as of May 21st, 2025. - [Scanning Tunneling Microscope](https://docs.hackerfab.org/home/fab-toolkit/metrology-characterization/scanning-tunneling-microscope.md): Fall 2025 documentation @ CMU - [Chemicals / Materials](https://docs.hackerfab.org/home/fab-toolkit/chemicals-materials.md) - [Photoresists](https://docs.hackerfab.org/home/fab-toolkit/chemicals-materials/photoresists.md) - [Dielectrics](https://docs.hackerfab.org/home/fab-toolkit/chemicals-materials/dialectrics.md) - [Spin on Glass](https://docs.hackerfab.org/home/fab-toolkit/chemicals-materials/dialectrics/spin-on-glass.md) - [Conductors](https://docs.hackerfab.org/home/fab-toolkit/chemicals-materials/conductors.md) - [Aluminum](https://docs.hackerfab.org/home/fab-toolkit/chemicals-materials/conductors/aluminum.md) - [Etchants](https://docs.hackerfab.org/home/fab-toolkit/chemicals-materials/etchants.md) - [Hydrofluoric Acid](https://docs.hackerfab.org/home/fab-toolkit/chemicals-materials/etchants/hydrofluoric-acid.md) - [Aluminum Etchant (Nitric, Acetic, Phosphoric Acids)](https://docs.hackerfab.org/home/fab-toolkit/chemicals-materials/etchants/aluminum-etchant-nitric-acetic-phosphoric-acids.md) - [Dopant Sources](https://docs.hackerfab.org/home/fab-toolkit/chemicals-materials/dopant-sources.md) - [Submodules](https://docs.hackerfab.org/home/fab-toolkit/submodules.md) - [Piezo Nanopositioner (Stick Slip)](https://docs.hackerfab.org/home/fab-toolkit/submodules/piezo-nanopositioner-stick-slip.md): Based on Original Paper Found Here: https://www.sciencedirect.com/science/article/pii/S2468067222000621 - [Interferometer](https://docs.hackerfab.org/home/fab-toolkit/submodules/interferometer.md) - [Database](https://docs.hackerfab.org/home/fab-toolkit/database-build.md) - [Machine Integration](https://docs.hackerfab.org/home/fab-toolkit/database-build/machine-integration.md): Lab communication system for interaction between database website and individual tools - [Steps and Processes](https://docs.hackerfab.org/home/fab-toolkit/database-build/steps-and-processes.md): Streamlining steps and processes in the database - [Cleaving Jig](https://docs.hackerfab.org/home/fab-toolkit/cleaving-jig.md) --- # Agent Instructions: Querying This Documentation If you need additional information that is not directly available in this page, you can query the documentation dynamically by asking a question. Perform an HTTP GET request on the current page URL with the `ask` query parameter: ``` GET https://docs.hackerfab.org/home/fab-toolkit.md?ask= ``` The question should be specific, self-contained, and written in natural language. The response will contain a direct answer to the question and relevant excerpts and sources from the documentation. Use this mechanism when the answer is not explicitly present in the current page, you need clarification or additional context, or you want to retrieve related documentation sections.