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contribute.
  • Hacker Fab Documentation
  • Overview
    • ✨Current Fab Capabilities
      • Fab Capabilities November 2023
      • Fab Capabilities May 2023
  • 🟡Guides
    • Required Reading (todo)
    • Build-a-Fab
    • Filling in the Gaps - Background Resources
    • Part Sourcing
  • 📜Processes
    • Self-Aligned NMOS V1
  • Fab Toolkit
    • 🎥Patterning
      • Lithography Stepper V2.1
      • Lithography Stepper V2 Build
      • Lithography Stepper V1 Build
      • Getting started with Klayout
      • Patterning Tasks - Spring 2025
      • Blu-Ray Lithography
        • Work in Progress
          • KEM-497AAA Pin Out Analysis
        • Lithography Spinner V1
          • Documentation
            • Design Datasheets
          • Hardware
            • BU40N Reference Design
          • Software
        • Base Principles
    • 🧱Deposition
      • 💡Thermal Evaporator V1 Build (WIP)
      • Spin Coater V2 Build (work in progress)
      • 💿Spin Coater V1 Build (to do)
      • Electroless Nickel Plating
      • ⚛️DIY ALD
      • ⚡Sputtering Chamber
    • 🕳️Etching
      • Plasma Etcher
      • HF Jig
    • 🛠️Other Processing Machines
      • Tube Furnace
      • Cleaving Jig
    • 🔍Metrology / Characterization
      • Probe Station
      • Semiconductor Parameter Analyzer
        • SMU - Analog Discoveries
        • SMU - Keithley 4200SCS
      • CV Measurements
      • Spectrometer
      • Profilometer
    • ⚗️Chemicals / Materials
      • Photoresists
      • Dielectrics
        • Spin on Glass
      • Conductors
        • Aluminum
      • Etchants
        • Hydrofluoric Acid
        • Aluminum Etchant (Nitric, Acetic, Phosphoric Acids)
      • Dopant Sources
    • 🤖Lab Automation
      • Automated Spin Coater
      • Gantry
      • Gripper
      • Liquid Handling
      • Tube Furnace (automated)
      • Wafer Cleaver
    • 🏘️Submodules
      • Piezo Nanopositioner (Stick Slip)
      • Interferometer
    • 📚Database
      • Machine Integration
      • Steps and Processes
  • 🧑‍🍳Standard Operating Procedures
    • Patterning SOP - Stepper V2
      • Vacuum Spin Coater SOP
      • Hot Plate SOP
      • Photoresist Strip SOP
    • Plasma Etcher SOP
    • Spin on Glass/Diffusant SOP
      • Spin on Glass Storage and Preparation
      • Spin on Glass Defect Inspection
      • Spin on Glass Thickness Measurement
    • Tube Furnace SOP
    • Glass Acid Etch SOP
    • DIY Thermal Evaporator SOP (CMU Version)
    • MTI Evaporator SOP (No longer in use)
    • Aluminum Etch SOP
    • Probe Station SOP
    • Probe Station SOP - V2
    • Wafer Cleaving SOP
    • Dry Oxide Growth SOP
    • Profilometer SOP
  • 🟢WORKING DOCS
    • CMOS Source/Drain Metal Contact Optimization
    • CMOS Doping Process Development
    • Sputtering Gate Oxides + Metal Gate Contacts
    • NAND + Inverter Characterization
    • CMU Updates
      • Example Student
      • Gina Seo
      • Jessica Wen
      • Yang Bai
      • Alex Echols
      • Gongwei Wang
      • Ying Meng
      • Shagun Maheshwari
      • Yuichi Hirose
      • Eric Dubberstein
      • Michael Juan
      • Justin Wang
      • Katie Eisenman
      • Marta Freitas
      • Matthew Choi's Updates
        • Week 2 Updates
        • Week 3 Updates
        • Week 4 Updates
        • Week 5 Update
        • Week 6 Update
        • Week 7 Update
        • Week 8 Update
        • Week 9 Update
        • Week 11 Update
        • Week 12 Update
        • Week 13 Update
      • Sandra You
      • Felicia Liu
      • Melinda Chen
      • Shayaan Gandhi
      • Sky Bailey
      • Haewon Uhm
      • James Lin
      • Ayan Ghosh
      • Advaith Menon
      • Adwoa Asare
      • Qirui (Ridge) Da Updates - Database
  • 🔲Templates (to do)
    • Build Manual Template
    • Bought Equipment Template
    • Standard Operating Procedure Template
    • BOM Template
    • Hardware X Template (for reference)
  • Archive
    • Patterning SOP - Stepper V1
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On this page
  • intro.
  • working on the hacker fab.
  • this website.
  • fab toolkit.
  • fabrication tools.
  • verification / metrology tools.
  • chemicals.
  • background and licensing.
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Last updated 1 month ago

intro.

Our Goals:

  1. Make integrated circuit prototyping as fast as 3D printing

  2. Make DIY version of every nanofabrication tool

  3. Get there with collaborative open source hardware

Right now we use factories and tools that are optimized to manufacture at scale to do our integrated circuit prototyping. There does not exist a set of machines that enable rapid tape-out of semiconductor devices on a budget, nor are there sufficient resources to make/modify fab tools from the ground up.

The use of low-cost, abundant, and fast-turn-around hardware serves a larger purpose than making the fab cheaper. These design constraints are what enable others to recreate, modify, and contribute to our work. The simpler the better.

Number of People Who Have Made a Transistor by Hand in a Hacker Fab

75

Number of Hacker Fabs

3 (+1 in progress)


working on the hacker fab.

You don't need prior nanofabrication experience to create meaningful contributions.


this website.

This page is a home for all shared documentation. There are enough resources here to turn an empty room into one that fabricates simple IC's in a matter of months.

Many pages are works-in-progress. It is natural for individual contributors' work-in-progress notes to exist on google drive, notion, etc. Links to these exist at the top of each page, however these notes move to Gitbook as soon as possible.

Any contributor can submit change requests with a free Gitbook account. All of this is on Github, but formatted nicely here on Gitbook. You can contribute directly through Github as well.


fab toolkit.

Here is a list of all the tools built or bought necessary to make our devices.

Every build contains:

  • BOM

  • Links to Design Files

  • Links to Code

  • First Principles Understanding of Machine Design (WIP)

fabrication tools.

verification / metrology tools.

chemicals.


background and licensing.

The Hacker Fab was started by Elio Bourcart, Alexander Hakim, and Sam Zeloof.

The Hacker Fab is run entirely by independent contributors.

Hardware: CERN-OHL-W

For example, if you release HDL files under CERN-OHL-W and then somebody uses those files in their FPGA, when they distribute the bitstream (either putting it online or shipping a product with it) they do not to make the rest of the HDL design available under CERN-OHL-W as well.

Software: MPL v2.0

The MPL’s “file-level” copyleft is designed to encourage contributors to share modifications they make to your code, while still allowing them to combine your code with code under other licenses (open or proprietary) with minimal restrictions.

Documentation: CC BY-SA 4.0

Nanofabrication is often communicated as complex , where every machine is immutable. We believe that innovation in the industry requires a thorough understanding of these machines from first principles, which will lead us to simpler solutions. Even on machines and processes of magnitudes less complexity than modern industry, there are designs worth sharing.

You do need to read the .

You don't need to recreate the entire fab to contribute, .

We communicate entirely over .

For the most up-to-date status on everything, join the .

The Hacker Fab was inspired by .

The first Hacker Fab was opened at .

This license enables reusers to distribute, remix, adapt, and build upon the material in any medium or format, so long as attribution is given to the creator. The license allows for commercial use. If you remix, adapt, or build upon the material, you must license the modified material under identical terms.

Photoresists + Developers

Dielectrics

Conductors

Etchants

Dopant Sources

magic
Required Reading
although you can
Discord
Discord
Sam Zeloof
Carnegie Mellon University
https://ohwr.org/project/cernohl/wikis/faq#q-what-are-all-these-suffixes
https://ohwr.org/cern_ohl_w_v2.pdf
https://www.mozilla.org/en-US/MPL/2.0/
https://www.mozilla.org/en-US/MPL/2.0/FAQ/
https://creativecommons.org/licenses/by-sa/4.0/
https://creativecommons.org/share-your-work/cclicenses/

3-Axis Piezo Nanopositioner

Build for $500

Electroless Plating

Optical Spectrometer

discord.

github.

x.

for $500

Build
Cover

Hot Plate

Cover

Lithography Stepper V2

Carnegie Mellon

Cover

Vacuum Spin Coater V1

Carnegie Mellon

Cover

Thermal Evaporator V1 (work in progress)

Carnegie Mellon

Cover

Tube Furnace V1 (work in progress)

Projects in Flight

Cover

Plasma Etcher

Plasma Etch PE-25

Cover

DIY SMU

Buy for $800

Cover

Probe Station V1

for $125

for $3,015

for $200

for $15,000

for $200

for $17,400

for $15,800

Buy
Buy
Buy
SOP
Build
SOP
Build
SOP
Build
SOP
Build
SOP
SOP
SOP