Vacuum Spin Coater SOP
Purpose
To apply a thin layer of wet chemicals to the surface of the chip, with sub-micron control.
Troubleshooting and Best Practices
Procedure
Plug in the Spin coater and the vacuum pump (if either is not able to power on try hitting βresetβ on the outlet)
Use the arrows on the touch screen to set the spin time and rpm
Use tweezers to place wafer onto the o-ring so that the chip completely covers the o-ring and will seal onto it
Also attempt to center the chip on the o-ring as best you can. This will minimize the chances of it flying off.
Use a pipette to apply liquid on top of the wafer while it is seated in the spin coater. You only need a couple drops in the pipette, don't suck up extra.
Close the HMDS/photoresist/SOG lid.
Close the spin coater lid
SWITCH ON THE VACUUM PUMP!
Press βbeginβ
This will begin a pre spin at 600 rpm
Press βcoatβ
When the spin time has been reached, the coater will automatically ramp down to rest
Open the lid and remove the wafer with tweezers
Side Notes
If you hear the spin coater constantly beeping, this is normal. It does this because we are using a drone motor ESC, so it is programmed to make a noise after being at rest for a few minutes. Itβs trying to help you find it π
Feel free to turn it off using the switch in the front so the noise goes away.
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