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  • Hacker Fab Documentation
  • Overview
    • ✨Current Fab Capabilities
      • Fab Capabilities November 2023
      • Fab Capabilities May 2023
  • 🟡Guides
    • Required Reading (todo)
    • Build-a-Fab
    • Filling in the Gaps - Background Resources
    • Part Sourcing
  • 📜Processes
    • Self-Aligned NMOS V1
  • Fab Toolkit
    • 🎥Patterning
      • Lithography Stepper V2 Build
      • Lithography Stepper V1 Build
      • Getting started with Klayout
    • 🧱Deposition
      • 💡Thermal Evaporator V1 Build (WIP)
      • Spin Coater V2 Build (work in progress)
      • 💿Spin Coater V1 Build (to do)
      • Electroless Nickel Plating
      • ⚛️DIY ALD
    • 🕳️Etching
      • Plasma Etcher
      • HF Jig
    • 🛠️Other Processing Machines
      • Tube Furnace
      • Cleaving Jig
    • 🔍Metrology / Characterization
      • Probe Station
      • Semiconductor Parameter Analyzer
        • SMU - Analog Discoveries
        • SMU - Keithley 4200SCS
      • CV Measurements
      • Spectrometer
      • Profilometer
    • ⚗️Chemicals / Materials
      • Photoresists
      • Dielectrics
        • Spin on Glass
      • Conductors
        • Aluminum
      • Etchants
        • Hydrofluoric Acid
        • Aluminum Etchant (Nitric, Acetic, Phosphoric Acids)
      • Dopant Sources
    • 🧠Automation
      • Lab Robot
    • 🏘️Submodules
      • Piezo Nanopositioner (Stick Slip)
      • Interferometer
  • 🧑‍🍳Standard Operating Procedures
    • Patterning SOP - Stepper V2
      • Vacuum Spin Coater SOP
      • Hot Plate SOP
      • Photoresist Strip SOP
    • Plasma Etcher SOP
    • Spin on Glass SOP
      • Spin on Glass Storage and Preparation
      • Spin on Glass Defect Inspection
      • Spin on Glass Thickness Measurement
    • Tube Furnace SOP
    • Glass Acid Etch SOP
    • DIY Thermal Evaporator SOP
    • Evaporator SOP
    • Aluminum Etch SOP
    • Probe Station SOP
    • Probe Station SOP - V2
    • Wafer Cleaving SOP
    • Dry Oxide Growth SOP
    • Profilometer SOP
  • 🟢WORKING DOCS
    • NAND + Inverter Characterization
    • CMU Updates
      • Gongwei Wang's updates
      • Example Student
      • Eric Dubberstein
  • 🔲Templates (to do)
    • Build Manual Template
    • Bought Equipment Template
    • Standard Operating Procedure Template
    • BOM Template
    • Hardware X Template (for reference)
  • Archive
    • Patterning SOP - Stepper V1
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  1. Fab Toolkit

Other Processing Machines

Last updated 1 year ago

🛠️
Tube Furnace
Cleaving Jig